Hello ...

I think that almos all plasma cleaners are good for it. =I make my
seals in a very old plasma cleaner, but you may have to re optimize
your sealing parameters like O2 pressure and time if you chance your
plasma source.

this is a good reference for PDMS?Glass plasma sealing

Jo BH, Van Leberghe LM, Motsegood KM, Beebe DJ, Journal of
Microeletromechanical Systems, 2000, 9(1), 76-81.

Regards

NH


> Hello,
> I normally plasma bond PDMS and glass in our lab. Off late, the plasma
> cleaner manufactured by YES has broken down and we dont know what the
> problem is. It has been down for 3 months now and our lab technician
> tells me that it has to do with the software. This has slowed down our
> fabrication and hence the experiments which follow the fabrication.
>
> I was wondering if you could tell me of any sources who can plasma
> bond PDMS and glass.