Hello,
It is possible to bond PDMS to PMMA through the use of a capacitively
induced oxygen plasma.  However, care must be taken with the plasma
system used.  Most plasma systems will also begin to etch the surface of
the material, especially when using an oxygen plasma on organic
materials.

Instead, the use of a dedicated system specifically intended for plasma
activation for bonding should be used.  Here are a couple references for
the use of plasma activation for cyclo-olefin and PMMA bonding.

Besides that, you can do the bonding of PDMS to PMMA and PC by thermal
bonding, Aneling bonding, even by UV sensitive glue.

Mizuno, J., et. Al "Cyclo-Olefin Polymer Direct Bonding Using Low
Temperature Plasma Activation Bonding", Proceedings of the 13th
International Conference on Solid-State Sensors, Actuators, and
Microsystems, Seoul, Korea, June 5-9, 2005

Glinsner, T., et. Al "Fabrication of Novel Type Microfluidic Devices by
Hot Embossing Technology," Proceedings of the 9th International
Conference on the Commercialization of Micro and Nano Systems, Edmonton,
Alberta, Canada, 29 August - 2 September 2004

Hope it will help you.


Mamun Rashid
PhD Student
Centre for Nano & Microsystems
University of Teesside
TS1 3BA. U.K
www.mamun.info
+44(0)164 234 2428



-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Jing Wang
Sent: 01 August 2007 01:17
To: [email protected]
Subject: [mems-talk] PDMS to PMMA/polycarbonate bonding

Hi,
I have googled and searched here. There is no recipe for PDMS and PMMA
bonding.  Anybody have one?

My purpose is either bonding my microfluidic chip (PDMS) to PMMA or
Polycarbonate substrate, or directly cast my microfluidic chip onto
PMMA/polycarbonate substrate.

I have tried plasma treatment the same condition as PDMS to Silicon
bonding.
But it is not solid bond. I can easily peel it off the PMMA.