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MEMSnet Home: MEMS-Talk: PDMS to PMMA/polycarbonate bonding
PDMS to PMMA/polycarbonate bonding
2007-08-01
Jing Wang
2007-08-01
Rashid, Mamun
2007-08-01
Jim
2007-08-01
Rashid, Mamun
PDMS to PMMA/polycarbonate bonding
Jim
2007-08-01
Mamun,
Appreciate your response first.  I have got the first paper but the second
one is hardly got.

Basically, the first paper is talking about thermal bonding between PMMA to
PMMA. I am pretty sure it will do. I actually did that before. I am not sure
it is feasible to do PDMS to PMMA thermal bonding since the microfluidic
structure will get deformed at PDMS part.  Also, I have baked my combination
upto 100C, which is very close to PMMA glass temperature, still no bonding
effect.

Is there any solvent based bonding recipe?
Many thanks,
Jim

On 8/1/07, Rashid, Mamun  wrote:
>
> Hello,
> It is possible to bond PDMS to PMMA through the use of a capacitively
> induced oxygen plasma.  However, care must be taken with the plasma
> system used.  Most plasma systems will also begin to etch the surface of
> the material, especially when using an oxygen plasma on organic
> materials.
>
> Instead, the use of a dedicated system specifically intended for plasma
> activation for bonding should be used.  Here are a couple references for
> the use of plasma activation for cyclo-olefin and PMMA bonding.
>
> Besides that, you can do the bonding of PDMS to PMMA and PC by thermal
> bonding, Aneling bonding, even by UV sensitive glue.
>
> Mizuno, J., et. Al "Cyclo-Olefin Polymer Direct Bonding Using Low
> Temperature Plasma Activation Bonding", Proceedings of the 13th
> International Conference on Solid-State Sensors, Actuators, and
> Microsystems, Seoul, Korea, June 5-9, 2005
>
> Glinsner, T., et. Al "Fabrication of Novel Type Microfluidic Devices by
> Hot Embossing Technology," Proceedings of the 9th International
> Conference on the Commercialization of Micro and Nano Systems, Edmonton,
> Alberta, Canada, 29 August - 2 September 2004
reply
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