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MEMSnet Home: MEMS-Talk: Polyimide and Nanostrip?
Polyimide and Nanostrip?
2007-08-06
Michael D Martin
Polyimide and Nanostrip?
Michael D Martin
2007-08-06
Hi, I'm curious to know other's experience with the compatibility of Polyimide,
such as 2611 from HD Microsystems, with room temperature nanostrip.  My
experience has been that it will usually survive exposure  to nanostrip for an
hour or more if it is first dehydrated.  But lately our cured 3-4 micron thick
2611 is being vigorously attacked and completely etched within 15 minutes
whether baked out or not.   Could trace moisture in the liquid precursor have an
affect?  Some polyimide users in our cleanroom have been opening the
refrigerated 2611 container without letting it reach room temperature first.


Thanks,
   Michael Martin
   U. of Louisville
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