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MEMSnet Home: MEMS-Talk: Cleaning blackened plasma-damaged resist from goldconductors
Cleaning blackened plasma-damaged resist from gold conductors
2007-08-10
Yue Mun Pun, Jeffrey
Cleaning blackened plasma-damaged resist from goldconductors
2007-08-10
[email protected]
2007-08-10
Jaibir sharma
Cleaning blackened plasma-damaged resist from goldconductors
2007-08-10
Yue Mun Pun, Jeffrey
Cleaning blackened plasma-damaged resist from goldconductors
Yue Mun Pun, Jeffrey
2007-08-10
I have tried Piranha with the concentration you mentioned for various
timings up to 1hr even at 80-90'C, as I mentioned in my first email, but
this did not seem to clean the blackened resist stringers.  The SiO2
surface is very clean, but the gold conductors still have the blackened
stringers.

Jeffrey

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