A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: dry etch recipe for Prolift100 polyimide (Brewer Science)
dry etch recipe for Prolift100 polyimide (Brewer Science)
2007-08-17
Jill Yang
2007-08-17
[email protected]
dry etch recipe for Prolift100 polyimide (BrewerScience)
2007-08-18
Jill Yang
dry etch recipe for Prolift100 polyimide (BrewerScience)
2007-08-20
Gordon Whitlock
dry etch recipe for Prolift100 polyimide (Brewer Science)
Jill Yang
2007-08-17
Anyone used Brewer Science's polyimide (prolift-100)? How to dry etch a
"clean" via without residue? Oxygen plasma with photoresist mask doesn't do
a good job --- lot of grass at the bottom of the via.

Thanks.
-Jill

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Nano-Master, Inc.
The Branford Group
Tanner EDA by Mentor Graphics