>From: [email protected]
>Reply-To: General MEMS discussion 
>To: [email protected]
>Subject: Re: [mems-talk] dry etch recipe for Prolift100 polyimide
>(BrewerScience)
>Date: Fri, 17 Aug 2007 12:42:34 -0400
>
>You probably need to add about 3-5% CF4 to your receipe. That should be
>enough to etch the carbon filler material used in most polyimide
>formulations. Bob Henderson
>

Yes, I guess we all know that additional CF4 "should" remove the grass. But
in fact it doesn't work well.