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MEMSnet Home: MEMS-Talk: Negative resist studies
Negative resist studies
2007-08-28
Ron Martin
2007-08-28
Bill Moffat
2007-08-28
Ron Martin
Negative resist studies
Ron Martin
2007-08-28
Hello,

        I am looking into obtaining literature on negative resist.  I was
told that in the 70s, there was an active body of research pertaining to
negative resist studies.  I am primarily interested in negative
cross-linking events (especially the accidental, non-intentional ones that
lead to residue).  I appreciate any help.  Thanks.

Ron Martin
BEI Systron Donner
QFAB Lithography Engineer
office:  925-671-6563

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