A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Au clustering
Au clustering
2007-09-05
Matteo Dainese
2007-09-05
Shay Kaplan
Au clustering
Matteo Dainese
2007-09-05
Hello,
In a fabrication process I'm running now I have an 200nm Au film deposited
on a Si substrate. The process doesn't allow me to use adhesion layers
like Ti or Cr so I was trying to improve the adhesion of Au to Si by
heating in a convection oven in the nearby of the Au-Si eutectic
temperature, in order to generate the necessary intermixing at the
interface which is usually used in the standard Au-Si eutectic bond.
On the other hand what I observe after the oven treatment is the
considerable formation of Au agglomerates on the surface, which look
sometimes like geometrical fractals.
Has anybody seen something similar and knows how to avoid it, or this
whole approach is just a bad idea?

Thanks
Matteo

KTH - Dept. of Microelectronics
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Tanner EDA by Mentor Graphics
Mentor Graphics Corporation
University Wafer