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MEMSnet Home: MEMS-Talk: step coverage on DRIE topography
step coverage on DRIE topography
2007-09-10
kris
2007-09-10
Nicolas Duarte
step coverage on DRIE topography
kris
2007-09-10
Hello All,

I was wondering if we can get a continuous thin metal
film (sputtering or evaporation)on the top of the
silicon wafer that is subjected to DRIE in STS system.


The released DRIE`d structures should be conductive
for the actuation with the adjacent substrate.

Thanks,
Kris
reply
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