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MEMSnet Home: MEMS-Talk: SU-8 adhesion on ITO coated glass
SU-8 adhesion on ITO coated glass
2007-09-11
Steve Jung
2007-09-11
[email protected]
silicon (111)
2007-09-11
Andrea Mazzolari
Paging Dr. Namwoong Paik
2007-09-11
David Grove
SU-8 adhesion on ITO coated glass
Steve Jung
2007-09-11
Dear all,


I am planning to build SU-8 pillars for a microfluidic device
but have some questions in choosing the right product.

The SU-8 pillars (ca. 10um) are supposed to be built on
an ITO coated glass and I heard the adhesion of SU-8 on
glass substrate is very poor.


Does the adhesion property get worse on ITO coated glass
substrates than on normal glass substrates?


Also, does the adhesion property of SU-8 2000 (MCC)
differ from the original SU-8 (MCC)?

If so, could anyone tell me which product would more
be advantageous to coat on an ITO coated glass substrate?


Any help will be appreciated,

Best Regards,

Steve Jung

-----------------------------------------------
Steve Jung
Micro and Nano Engineering Laboratory
Dept. of Electrical Engineering, Sogang University
Tel. : +82-2-717-9800
E-mail :
[email protected]
-----------------------------------------------
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