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MEMSnet Home: MEMS-Talk: EDP etch compatibility
EDP etch compatibility
2007-09-12
Ho Yin Chan
2007-09-12
Michael D Martin
2007-09-12
Nicolas Duarte
EDP etch compatibility
Ho Yin Chan
2007-09-12
Hi,

 Currently, I am doing EDP process with Ti/Au/Ag stacks on SiO2. It is found
that the metal stack pattern has gone after EDP etch.  Could you share with
me your experience? I am guessing if the problem is caused by Ti.

Thanks
HY
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