Hi,all
I got two questions to ask

1) Can SU-8 Development be done completely by developer without any
De-Scum process? I plan to fabricate a SU-8 microfluidic channel with
width of 100microns and depth of 10/20micons. I am just afraid it is
not easy to developed SU-8 in the channel bottom completely so that
the flow will be block somewhere as it is a surface tension driven
flow. (Any method to detect whether SU-8 has been developed
completely, microscope or profiler?)

2)  For laser driling, how high the temperature will go for substrate?
I will use ESI 5200 uVia YAG laser driller.

Thank you very much!
Best regards,
Yuming