I have an MTS 8800 with splashback problems, that is photo resist
redopositing on to the back side of the wafers.

I have check the exhaust and made sure it was the maximum. I have tried
recipe modifications with lower acceleration for the resist spin step.
These are the standard causes for the problem.

I would like to know the following.

1. Does anyone have a contact for persons manufacturing retrofit resist
spin bowls?

2. Does anyone have a fix for this or suggestions.

Thanks

Ed Sebesta