A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Green box light supplier, looking for a Unilamp
Green box light supplier, looking for a Unilamp
2007-09-20
Edward Sebesta
Green box light supplier, looking for a Unilamp
Edward Sebesta
2007-09-20
I am looking for a Unilamp or the equivalent.

This was a tilted green box that provided green light over an area to
view resist spins for defects.

This is NOT a Hg Lamp with a green filter and it is NOT a bright light
box.

It worked by illuminating the wafer and spin non-uniformity show due to
interference effects with the green light.

The Unilamp was a common tool in the 1980s, and the manufacturer is no
longer in existence. Advanced semiconductors doesn't need them, it was a
1980s technology and MEMS processing, which seems to be a 1980s
technology for processing could use them.

Ed
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Mentor Graphics Corporation
MEMS Technology Review
The Branford Group