A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Nb wet etching
Nb wet etching
2007-09-22
Sadhana Patil
2007-09-24
Kirt Williams
2007-09-24
Edward Sebesta
2007-09-24
Roger Shile
Nb wet etching
Sadhana Patil
2007-09-22
Hi all,
Looking for some help on the kind of wet etchants available for etching Nb.
I have vaguely heard about HF(1):HNO3(1). Does anybody have an idea of
what is the etch rate of this chemical for Nb? Are there any other
etchants available for Nb? And does it etch other metals like Au, Fe,
CuMn, Ni?
Thanks,
ES...
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Addison Engineering
MEMStaff Inc.
MEMS Technology Review