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MEMSnet Home: MEMS-Talk: Photoresist as etch mask!
Photoresist as etch mask!
2007-10-01
Nitin Shukla
2007-10-02
Xiaoguang Liu
2007-10-02
sebastian wicklein
2007-10-02
Edward Sebesta
Photoresist as etch mask!
Xiaoguang Liu
2007-10-02
May I ask why do you have to use PR as a mask?

On 10/1/07, Nitin Shukla  wrote:
> Hi,
>   I would appreciate if anyone could suggest me a photoresist that would not
be etched by TMAH or KOH.
>


--
Xiaoguang "Leo" Liu
Birck Nanotechnology Center,
Purdue University,
1205 W.State Street, West Lafayette, IN, 47906 USA
liu79@purdue.edu
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