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MEMSnet Home: MEMS-Talk: Adhesion of SU-8 and gold to glass wafer
Adhesion of SU-8 and gold to glass wafer
2007-10-03
Yue Mun Pun, Jeffrey
2007-10-04
Silvan Schmid
2007-10-05
[email protected]
Adhesion of SU-8 and gold to glass wafer
Silvan Schmid
2007-10-04
Hi,

I recommend to use an adhesion layer for Au, such as Cr or Ti. You can
use the same with SU-8, but you do not need to.

Regards,
Silvan

Yue Mun Pun, Jeffrey schrieb:
> Hi,
> Can anyone tell me how I can ensure SU-8 and gold conductors adhere well to
glass wafer?
reply
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