A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: fudging/spreading around the PR features
fudging/spreading around the PR features
2007-10-05
Sadhana Patil
2007-10-05
Edward Sebesta
2007-10-06
Sadhana Patil
NC-200
2007-10-07
Andrea Mazzolari
2007-10-08
Edward Sebesta
Lithographic Tests masks for the EVG620
2007-10-12
Edward Sebesta
2007-10-05
Andrea Mazzolari
2007-10-05
dbp lists
2007-10-06
Andrea Mazzolari
2007-10-06
shay kaplan
Sapphire stiffness matrix
2007-10-07
Andrea Mazzolari
2007-10-06
[email protected]
fudging/spreading around the PR features
Sadhana Patil
2007-10-05
I am new to Photolithography. I am doing Photolithography with S1813.
Many a times I get fudging/spreading of photoresist around the edge of
the photoresist features after developing. They look more or less like
threads spreading outward from the feature.
Does anyone know what am I doing wrong?
~Sadhana
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Addison Engineering
Harrick Plasma, Inc.
University Wafer