Hi
This is very non trivial. First you have to make sure you don't have edges
or surface defects that act as field conetrators. Then you have to find the
Paschen curves for air and argon at the pressure and temperature you plan to
work at.
shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of ashwini jambhalikar
Sent: Friday, October 12, 2007 7:17 AM
To: [email protected]
Subject: [mems-talk] breakdown voltage in MEMS structures

Friends,
can somebody give me some reference about following problem:

if the gap between two electrodes,is 5 micron / 8 micron/10 micron
what voltage can be safely applied for electrostatic actuation,
considering air or argon or nitrogen as dielectric.