=09Hi all,

I need 1 micron thin (111) silicon layers. I have thought to realize the=
m
starting from SOI wafers and whould have some suggestions.
I plan to use SOI wafers woth the following specs:
Device layer: (111), about 1 um thin
oxide layer: any thickness
bulk layer: (110) or (100)
I will remove bulk layer and silicon layer with KOH and so i will obtain=
 a
thin (111) silicon layer. KOH will not etch (111) silicon layer.

As alternative, does someone know someone able to provide (111) silicon
layers about 1 micron thin ?

Best regards,
Andrea

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