A good general resource to check evaporation/sputtering conditions is:
http://www.lesker.com/newweb/menu_techinfo.cfm?CFID=1555271&CFTOKEN=59855514&sec
tion=materialdeposition&init=skip

(if that link isn't permanent, google "lesker material deposition table")

Indium has lots of info available.

- Kevin

*********************************
Kevin Paul Nichols
MESA+ Institute for Nanotechnology
Mesoscale Chemical Systems
Meander 151
University of Twente
Postbus 217
7500 AE Enschede
The Netherlands

Office: +31 (0)53 489 26 31
Mobile: +31 (0)6 49 312 471
Fax   : +31 (0)53 489 35 95
Email : [email protected]


-----Original Message-----
From: [email protected] on behalf of jpt sharma
Sent: Tue 10/23/2007 8:06 PM
To: [email protected]
Subject: [mems-talk] Indium Deposition

Hi All
  I am thinking of depositing indium for metal lift off. I am wondering anyone
has done this before? Can we deposit Indium by thermal?