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MEMSnet Home: MEMS-Talk: Striations during spin-coating
Striations during spin-coating
2007-10-24
Sandip Agarwal
2007-10-24
Matthew Walker
2007-10-24
Sandip Agarwal
2007-10-24
dbp lists
2007-10-25
Kevin Paul Nichols
2007-10-26
Nicolas Duarte
2007-10-25
Pablo de la Fuente
2007-10-25
Nodes Norbert
Striations during spin-coating
Pablo de la Fuente
2007-10-25
You can try to drop a big dose of the polymer on the substrate and wait till it
flows to cover the entire surface. Then spin.
This could improve the surface coating, but there could also be smaller
striations or ripples.

Dr. Pablo de la Fuente
Optical Development R&D Engineer

FAGOR AUTOMATION S. Coop.
Phone: 943 71 92 00
Fax: 943 71 92 03
e-mail: [email protected]
web: www.fagorautomation.com


Sandip Agarwal wrote:
> I am trying to spin-coat a polymer (1% PMMA-butadiene copolymer in
> toluene) on a substrate that has topographical features that are 50x50
> micron posts and 10 microns tall. I observe striations or ripples that
> run from the center of the substrate to the periphery after
> spin-coating. Any solutions? I have tried varying the concentration
and
> dynamic dispensing without any success.
reply
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