A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: Mechanical properties of silicon
Re: Mechanical properties of silicon
1998-08-05
John Neumann
1998-08-05
Kirthi Roberts
1998-08-05
John Karpinsky
1998-08-06
Eric Bonnotte
1998-08-06
Wen H. Ko
1998-08-05
Kirthi Roberts
1998-08-05
M.C. Federico Sandoval
1998-08-06
Brian S Cheung
1998-08-17
Ram N. Ramanan
Re: Mechanical properties of silicon
M.C. Federico Sandoval
1998-08-05
Hi Brian

For accelerometer design contact Dr. Jaume Esteve at CNM (Barcelona). His
email is the following:

jaume@cnm.es


Regards

Dr. Federico Sandoval-Ibarra

On Tue, 4 Aug 1998, Brian S Cheung wrote:

>
> My partner and I are undergraduate students who are working on a summer
> project, the design of a MEMS accelerometer, for our prof.  We would like
> to perform some CAD simulations of a silicon beam, but are lacking several
> of the values for silicon's mechanical properties.  We're not looking
> for highly detailed values, but some rough, crystal orientation
> averaged numbers that would give us reasonable results.  Can anyone
> recommend us to a good reference book, journal articles, web site, etc.
> Even better, if someone has already performed some computer simulations,
> we'd be grateful if you could share the property values used and how they
> compared to the reality.
>
> Much obliged.
>
>
>              *    "And then the storm breaks, and it is not thunder at
> Brian Cheung   *     all, but that entropic inner-ear whine of molecules
> U of Toronto   *     breaking apart and whirling away."
> EngSci 0T0     *                              -- Evolution's Shore
>                *                                 Ian McDonald
>
>
>
>


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
University Wafer
The Branford Group
Harrick Plasma, Inc.
MEMStaff Inc.