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MEMSnet Home: MEMS-Talk: TMAH Etching Silicon - loading effects
TMAH Etching Silicon - loading effects
2007-10-31
Staller, Steven E
2007-11-01
Shay Kaplan
TMAH Etching Silicon - loading effects
Staller, Steven E
2007-10-31
We believe we have observed a strong correlation of <100>:<1111> selectivity to
loading.

When we etch one wafer we get about ½ the selectivity as we do when we etch
25 or more.

Is this a known phenom? Should we expect the selectivity to be effected this
dramatically?

We are talking about selectivities of >65:1 vs ~30:1.

Steve
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