Nitin, maybe reactive sputtering of Al with Argon and nitrogen to form ALN
would work. Maybe worth a try. Gary

Gary Hillman
Service Support Specialties, Inc.
PO Box 365
9 Mars Court
Montville, NJ 07045
Telephone 973-263-0640 extension 35
Fax 973-263-8888

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Nitin Shukla
Sent: Thursday, November 01, 2007 12:14 PM
To: [email protected]
Subject: [mems-talk] e-beaming high thermal conductivity non-metals!


Hi,
I want to deposit thin film of some nonmetal having high thermal
conductivity (>10 W/m-K) on top of my samples using e-beam PVD deposition. I
tried Si (k~140 W/m-K) and Al2O3 (k~40 W/m-K) but it appears e-beam produces
amorphous form of these materials resulting in very low thermal conductivity
of the deposited film (~ 1-2 W/m-K).
I was wondering if anyone could suggest me some high thermal conductivity
non-metal that would maintain its high thermal conductivity in e-beam
deposition.