A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Best resist for HF etching
Best resist for HF etching
2007-11-15
Michael A Gingras
2007-11-16
Edward Sebesta
2007-11-16
Bob Henderson
2007-11-17
Bill Moffat
2007-11-16
Mikael Evander
2007-11-16
Andrea Mazzolari
2007-11-16
Mikael Evander
2007-11-16
Michael Larsson
2007-11-16
Haixin Zhu
2007-11-17
Carlo Webster
2007-11-17
Andrea Mazzolari
2007-11-16
Mikael Evander
2007-11-17
Michael Larsson
Best resist for HF etching
Mikael Evander
2007-11-16
Hi!

We usually have an etch-rate of 1.3 µm/min in borofloat. I'm not sure what you
mean with the primer though. We buy borofloat chrome blanks, expose them,
hardbake and etch.

/Mikael

----- Original Message -----
From: Andrea Mazzolari 
Date: Friday, November 16, 2007 3:28 am
Subject: Re: [mems-talk] Best resist for HF etching

> Hello Mikael,
> which is borofloat etch rate ? Which primer do you use ?
>
> Best regards,
> Andrea.


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Addison Engineering
MEMStaff Inc.
The Branford Group