Hi Kevin,

  Thanks for your comments.

  For my case, a little lateral nitride etch is acceptable. If I can have a
rough idea about PAN etch rate for Al and nitride, then I won't worry about the
lateral etch.

  Regards
  Lawrence


[email protected] »¡¡G
  If the etch rate is really that important for you, you should really think
about calibrating it yourself. Any numbers you're likely to have quoted to you
can vary wildly depending on the exact conditions that these two layers were
deposited under, and the total surface area being etched.

- Kevin Nichols