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MEMSnet Home: MEMS-Talk: Au-Au thermocompression bonding
Au-Au thermocompression bonding
2007-12-12
Joseph Grogan
2007-12-12
Felix Lu
Au-Au thermocompression bonding
Joseph Grogan
2007-12-12
Is there anybody out there with personal experience performing wafer
bonding by gold-to-gold thermocompression bonding? I've found several
papers, and performed several experiments, but I'm getting mixed results
and I'd like to discuss my process with someone who's done it.

thank you,
Joe Grogan
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