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MEMSnet Home: MEMS-Talk: Removal of native oxide layer on Nickel
Removal of native oxide layer on Nickel
2007-12-17
Martin Lapisa
2007-12-18
Martin Lapisa
Removal of native oxide layer on Nickel
Martin Lapisa
2007-12-17
Hello all!

In order to electroless plate Nickel on a Nickel start layer and obtain
homogenous results I dip the wafers into concentrated HCl/Isoprop mixture to
remove the native oxide before plating. I obtain quite good results with
this procedure but since HCl is quite rough towards a resist layer that is
also on the wafers, I would like to use a softer way to get rid of the
oxide.

Best regards,
Martin

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