How to uniformly etch ~0.05 - 0.3um off a 3" Si
wafer?
Andrea Mazzolari
2007-12-19
Hello Dave,
which is the thickness you need to remove ? Which is wafer orientation ?
Which is surface rougness you can accept ?
Andrea
> I need to uniformly remove a thin layer of Si off a 3" Si wafer. No
> structures, just the same material. No RIE. How to do it?
