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MEMSnet Home: MEMS-Talk: small RIE etchers
small RIE etchers
1995-10-10
Jose Roberto S.Senna
small RIE etchers
Jose Roberto S.Senna
1995-10-10
I would like to get some information , from the user's point of view, about the
MARCH CS-1701C RIE reactor.

On paper, it looks better than the comparatively-priced Technics Micro-RIE.

But I would like to hear your opinions about it.

Any info on limitations you have found using either of these, or any other
small RIE reactor in the same price range.

By the way, thanks a lot again to all those folks who gave me hints and
opinions about optical profilometers.

Jose Roberto Senna
LAS-INPE
Brazil


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