A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Etching silicon nitride
Etching silicon nitride
2008-01-08
Sandip Agarwal
2008-01-08
Bill Moffat
2008-01-08
Edward Sebesta
2008-01-08
Bob Henderson
2008-01-09
Kvel Bergtatt
Etching silicon nitride
Bill Moffat
2008-01-08
Not too many,  why not use CF4 plasma.

Bill Moffat, CEO
Yield Engineering Systems, Inc.
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353

bmoffat@yieldengineering.com

www.yieldengineering.com


-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Sandip Agarwal
Sent: Tuesday, January 08, 2008 7:49 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Etching silicon nitride

I want to pattern silicon nitride by etching with hot phosphoric acid.
What are the photoresists that would withstand these etching conditions?
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Nano-Master, Inc.
Tanner EDA by Mentor Graphics
Harrick Plasma, Inc.