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MEMSnet Home: MEMS-Talk: How to remove AZ photoresist in SU-8 microchannel?
How to remove AZ photoresist in SU-8 microchannel?
2008-01-30
Steven Yang
2008-01-30
Edward Sebesta
2008-02-01
Brubaker Chad
silicon plastic deformations applications
2008-02-02
Andrea Mazzolari
2008-02-02
Roger Brennan
2008-01-31
P.E.M. Kuijpers
2008-01-30
jpt sharma
2008-01-31
K.P.Nichols@utwente.nl
How to remove AZ photoresist in SU-8 microchannel?
K.P.Nichols@utwente.nl
2008-01-31
KOH will cause your SU-8 to peel off.

- Kevin Nichols

-----Original Message-----
From: mems-talk-bounces@memsnet.org on behalf of jpt sharma
Sent: Wed 1/30/2008 11:05 PM
To: General MEMS discussion
Subject: Re: [mems-talk] How to remove AZ photoresist in SU-8 microchannel?

Hi
 KOH solution can remove AZ 5214 but I am not sure what it does with SU-8.
Thanks
reply
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