Hi Elina,

Typically halogen-based plasma etching is used for etching TiSi2. However,
HF based etchants are known to have a detrimental effect on TiSi2. So you
could try to use BHF, for instance. If this doesn't work, you may also try
to use Piranha solution (50:1 ratio of H2SO4:H2O2) @ 120 C. Do let me if it
worked (and if there are any better tricks).

Hope this helps!
Vijay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Elina Iervolino - EWI
Sent: Thursday, January 31, 2008 5:26 PM
To: [email protected]
Subject: [mems-talk] TiSi2 etching

Hello everybody,
I made a layer of TiSi2 on the top of  my SiN cantilever
For the etching of my cantilever I used KOH but the TiSi2 does not survive.
It is like
a sheet that starts to remove from the SiN base

Does enyone experience with the TiSi2?
Which wet etchant should I use?