Deformation is very helpful in spreading resistance analysis. During
spreading resistance profiling of silicon and germanium, probe tips subject
small areas of the semiconductor to extreme pressure (~100 atmospheres).
The pressure deforms the local silicon causing some formation of a metallic
like, so-called “beta-tin" phase. This allows spreading resistance to make
ohmic contact (of nearly ohmic contact) to extremely high n- and p-type
resistivity (at least 40,000 ohm-cm) while applying as little as five
millivolts.

Roger Brennan, Solecon Labs


-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Andrea Mazzolari
Sent: Saturday, February 02, 2008 6:48 AM
To: General MEMS discussion
Subject: [mems-talk] silicon plastic deformations applications


Hi all,
i'm interested to silicon plastic deformations and applications of this
technology.
See for example the paper: "Hemisphere-shaped Si crystal wafers obtained
by plastic deformation and preparation of their solar cells.[J. Electron.
Mater.,34,(2005),1047-1052] K. Nakajima, K. Fujiwara, W. Pan".

Which could be pratical applications of silicon plastic deformations? I
presume that it could be possible to realize x-ray focusing and lenses
devices. Are there other possible applications ?

Many thanks,
Andrea