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MEMSnet Home: MEMS-Talk: Chromium reaction in DRIE (Bosch)?
Chromium reaction in DRIE (Bosch)?
2008-02-06
Sven Holmström
2008-02-06
Nodes Norbert
2008-02-06
Sven Holmström
Chromium reaction in DRIE (Bosch)?
Nodes Norbert
2008-02-06
Hello Mr. Holmström.

Even after removal with a suitable solvent, a very thin Cytop polymer layer can
remain on top of chrome and inhibit etching.
You may have to treat the surface with some plasma or ashing process before
chrome etching.

Best regards,
Norbert Nodes

[email protected]
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