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MEMSnet Home: MEMS-Talk: Wafer silicon smoothing surface
Wafer silicon smoothing surface
2008-02-07
mosha aharon
2008-02-07
Andrea Mazzolari
2008-02-10
Michael Arens
2008-02-10
Andrea Mazzolari
2008-02-12
Michael Arens
Wafer silicon smoothing surface
Michael Arens
2008-02-12
Hi
The article you send gave me another tool to achieve a
smooth surface.
Do you know about isotropic process that achieve
smooth surface ?
I want to get a smooth surface and a rounded angle
where there are sharp angles after the KOH etching .

best regards

reply
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