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MEMSnet Home: MEMS-Talk: Negative photoresist?
Negative photoresist?
2008-02-20
Ferda Mravenec
2008-02-20
jpt sharma
Negative photoresist?
jpt sharma
2008-02-20
Hello All

I have been trying to make an electrical contact in some molecular conductors
using conventional lithography. The conductors is about 5 micron thick and 5
micro wide. While doing the liftoff processes the metal is not enough (20nm TI+
100nm AU)  to hold the sample while doing liftoff. I tried with more metal, I
couldn't liftoff at all. I have been using AZ5412 image reversal PR to make
undercut profile. I am wondering if any one of you have some experience with
making electrical contacts in relatively thick sample.

Look forward to hear from you.


Regards
J . Sharma

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