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MEMSnet Home: MEMS-Talk: electrical fabrication in molecular conductors
electrical fabrication in molecular conductors
2008-02-20
jpt sharma
electrical fabrication in molecular conductors
jpt sharma
2008-02-20
Hello All

I have been trying to make an electrical contact in some
molecular conductors using conventional lithography.
The conductors are about 5 micron thick and 5 micron wide.

While doing the liftoff processes the metal is not enough
(20nm TI+ 100nm AU)  to hold the sample while doing liftoff.

I tried with more metal, I couldn't liftoff at all. I have
been using AZ5412 image reversal PR to make undercut profile.

I am wondering if any one of you have some experience
with making electrical contacts in relatively thick samples.

Look forward to hear from you.

Regards
J .. Sharma
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