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MEMSnet Home: MEMS-Talk: Anneal recipe for Pt thin film on Si wafer
Anneal recipe for Pt thin film on Si wafer
2008-02-28
Miyakawa, Natsuki
2008-03-03
Oliver Horn
2008-03-05
Michael D Martin
2008-03-05
Gary Hillman
2008-03-05
Miyakawa, Natsuki
Anneal recipe for Pt thin film on Si wafer
Oliver Horn
2008-03-03
Hello Natsuki,

you will get PtSi or PtSi2 if you heat up Pt on Si without diffusion
barrier, even at 260°C.  The adhesion is only a bit improved.

Oliver
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