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MEMSnet Home: MEMS-Talk: Titanium etch
Titanium etch
2008-03-07
Michael Cooke
2008-03-07
Brent Garber
2008-03-08
Deepasree Konduparthi
Titanium etch
Brent Garber
2008-03-07
Mike,

H2O2 @ 50c

Brent

Michael Cooke wrote:
> Dear all,
>
> I was wondering if there is a safer etch for Titanium which I haven't
> come across which doesn't involve HF or HF as a biproduct. Ideally it
> should be done at room temp.
>
reply
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