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MEMSnet Home: MEMS-Talk: trichlorosilane procedure
trichlorosilane procedure
2008-03-10
Xinyu Li
2008-03-10
Bill Moffat
trichlorosilane procedure
Bill Moffat
2008-03-10
Yes, web site www.yieldengineeing.com and look for the 1224P a piece of =
standard equipment designed for this.  The MEMS site does not like =
advertising so I will send more details of the unit to your email.  Bill =
Moffat

________________________________

From: [email protected] on behalf of Xinyu Li
Sent: Mon 3/10/2008 5:51 AM
To: [email protected]
Subject: [mems-talk] trichlorosilane procedure


Hello friends in MEMS and microfluidics,

If I want to use a solution flow through microchannel to treat PDMS
surface by using trichlorosilane, anybody has some standard procedure
for this type of work?
reply
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