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MEMSnet Home: MEMS-Talk: RCA Etch??
RCA Etch??
1998-08-24
Jason Tauscher
RCA Etch??
Jason Tauscher
1998-08-24
Someone mentioned a solution used to clean off Organic contaminants
called RCA Etch or something similar.  It was developed in the 70's or
earlier, but I can't find any literature on it.  I believe that it
contains H2O2 and H2SO4 but I don't know in what proportions.  If anyone
can help  me out, I'd appreciate it.
 We're having some problems with "sticking" of our capacitive
accelerometers and want to eliminate the possibility of organic
contaminants.  Any suggestions would be appreciated.

Thanks.

Jason Tauscher


Jason@sdi.wa.com


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