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MEMSnet Home: MEMS-Talk: wet etch of LPCVD amorphous Silicon
wet etch of LPCVD amorphous Silicon
2008-03-12
Haixin Zhu
2008-03-13
Kvel Bergtatt
2008-03-13
Roger Shile
wet etch of LPCVD amorphous Silicon
Kvel Bergtatt
2008-03-13
any quaternary amine at high T (60-80C) should work.

On Wed, Mar 12, 2008 at 3:12 PM, Haixin Zhu  wrote:

> Dear all,
>
> I am looking for the wet etchant for LPCVD a-Si, anyone has suggestion?
>
> Thanks
>
> Michael
--
_v
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