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MEMSnet Home: MEMS-Talk: NaOH Resistant Sealant
NaOH Resistant Sealant
2008-03-14
Slade, Darren (SELEX GALILEO, UK)
2008-03-14
Miyakawa, Natsuki
NaOH Resistant Sealant
Slade, Darren (SELEX GALILEO, UK)
2008-03-14
Hi All,

I am looking for a something in the way of a sealant to protect Al bond
pads on a silicon wafer from being attacked in NaOH/H2O2 etch.
The sealant should be low/non-outgassing, low (<80degC) cure temp, low
viscosity and easily and completely removable with domestic chemicals
(acetone, tetrachloroethylene etc).

I'll be grateful for any recommendations, even if they don't meet all
the specs above. I am currently using Dow Corning DC282, but it is not
wholly resistant to the NaOH.

Many Thanks,
Darren.

SELEX Sensors and Airborne Systems Limited
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