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MEMSnet Home: MEMS-Talk: Ultra-clean wafer shipping containers
Ultra-clean wafer shipping containers
1998-08-26
Perry Skeath
Ultra-clean wafer shipping containers
Perry Skeath
1998-08-26
Hello -

What type of wafer shipping container is clean enough that we can ship
clean silicon wafers for aligned fusion bonding at another site?  The other
site can not easily clean the wafers before aligning and contacting them.

We are currently using EMPAK's H9100 pre-cleaned Ultrapak containers.  We
would very much appreciate if others could tell us their experiences with
shipping wafers without contamination by particles or organic deposits.
What kind of container works for this purpose?
How should the container be cleaned?
Have you had success with recycling containers?

Perry Skeath
SprayChip Systems Corp.
9841 Greenbelt Road, Suite 101
Seabrook MD 20706-6270
(301) 552-5570 voice
(301) 552-5573 fax


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