One possible recipe to etch TiO2 is:

CF4(35sccm) at 50 mToor, 100W, etch 10nm TiO2 for ~6 minutes.

Hope this can help.

Jin

-----Original Message-----
From: Bhargav Nabar [mailto:[email protected]]
Sent: 02 April 2008 19:43
To: [email protected]
Subject: [mems-talk] TiO2 thin film mechanical properties deposition
dryetching

 *TiO2 thin film mechanical properties, deposition, dry etching.*

Hello everyone,

Titanium dioxide (TiO2) thin film mechanical properties : I need to deposit
a thin amorphous film of Titanium dioxide TiO2 about 100 - 200 nm thick. If
anyone has any information on the mechanical properties of thin film TiO2
such as tensile strength, Young's modulus, Bulk modulus, Fatigue, Poisson's
ratio, force -displacement results or pressure -displacement results please
help.

Titanium Dioxide (TiO2) deposition : What is the best way to deposit a thin
film of TiO2 so as to have a very low surface energy?

Titanium Dioxide (TiO2) Etching: What is the best dry etch chemistry for
TIO2? Can TiO2 be etched in Ar/Sf6 plasma at 80-90 mtorr?