A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Silicon Carbide Bonding
Silicon Carbide Bonding
2008-04-04
Ben Pecholt
Silicon Carbide Bonding
Ben Pecholt
2008-04-04
I am trying to bond a Silicon Carbide wafer (6H-SiC) in a prototype/test
packaging application (~500 C). Does anybody know of a bonding method that
will provide a strong mechanical bond? I have not heard of anybody using
anodic or fusion bonding for SiC. Thanks!

--
Ben Pecholt
Graduate Student
Mechanical Engineering
Iowa State University
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
The Branford Group
University Wafer
Mentor Graphics Corporation