Yoshi,

      I can't say if it is smooth enough for your particular application
since I don't know it. However, it should be fairly smooth. I would etch
a substrate and then evaluate it through microscope inspection and what
other inspection tools you might have. If the Pyrex is not homogenous,
the surface is rough, but I would think Pyrex is homogenous.

Ed

-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Yoshi.Sakata_Gmail
Sent: Friday, April 04, 2008 7:16 PM
To: 'General MEMS discussion'
Subject: RE: [mems-talk] Pyrex isotropic etching

Hi Ed,

Thank you for your suggestion.
Is the surface etched using "BOE" still smooth enough? I will put Au
electrode on the surface.

Regards,
Yoshi